Clean Gas Filter SF
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Air Preparation Filters
Clean Gas Filter SF
・Cartridge type allows for element replacement (SFA100/200/300, SFB100) ・Compact, disposable type for the semiconductor industry (SFB300, SFC100) |
| Type | Series | Operating pressure | Filtration |
|---|---|---|---|
| Cartridge type Disc | SFA100/200/300 | Max.0.99MPa （Vacuum：1.3×10－6kPa） | 0.01μm (Filtration efficiency 99.99%) |
| Cartridge type Straight | SFB100 | Max.0.99MPa （Vacuum：1.3×10－6kPa） | 0.01μm (Filtration efficiency 99.99%) |
| Cartridge type Straight | SFB200 | Max.0.99MPa （Vacuum：1.3×10－6kPa） | 120μm |
| Disposable type Straight | SFB300 | Max.0.99MPa （Vacuum：1.3×10－6kPa） | 0.01μm (Filtration efficiency 99.99%) |
| Disposable type Multiple disc | SFC100 | Max.0.99MPa （Vacuum：1.3×10－6kPa） | 0.01μm (Filtration efficiency 99.99%) |